"Realization and SEM Observation of Polysilicon and Aluminium Cantilever ..."

Sandrine Lucas et al. (1999)

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DOI: 10.1109/MSE.1999.787021

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Sandrine Lucas, N. Outaleb, Olivier Bonnaud, J. Pine:
Realization and SEM Observation of Polysilicon and Aluminium Cantilever Using Surface Micromachining Technology. MSE 1999: 28-29

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