"Single Dopant Lithography for the Fabrication of Atomic-scale Devices and ..."

Ivo W. Rangelow et al. (2024)

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DOI: 10.23919/MIXDES62605.2024.10614012

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Ivo W. Rangelow, Thomas Schenkel, Arun Persaud, Zahid Durrani, Mervyn Jones, Hans-Georg Pietscher, Fabian Dietrich, Aditya S. Tan, Jaqueline Stauffenberg, Eberhard Manske, Thomas Fröhlich, Dimitre Karpuzov:
Single Dopant Lithography for the Fabrication of Atomic-scale Devices and Quantum Systems. MIXDES 2024: 23-28

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