"Capacitance Deviation Caused by Mechanical Deformation of MEMS Inertial ..."

Jacek Nazdrowicz, Adam Stawinski, Andrzej Napieralski (2020)

> Home

Details and statistics

DOI: —

access: closed

type: Conference or Workshop Paper

metadata version: 2020-08-13

- view
  - electronic edition @ ieee.org
- export record
  dblp key:
  - conf/mixdes/NazdrowiczSN20
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/mixdes/NazdrowiczSN20
Jacek Nazdrowicz, Adam Stawinski, Andrzej Napieralski:
Capacitance Deviation Caused by Mechanical Deformation of MEMS Inertial Structure. MIXDES 2020: 151-155

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.