"Low temperature deposition of SiNx thin films by the LPCVD method."

Zdenko Tijanic et al. (2011)

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DOI: —

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-11

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  dblp key:
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  - https://dblp.org/rec/conf/mipro/TijanicRIBMRGMFCFR11
Zdenko Tijanic, Davor Ristic, Mile Ivanda, Ivancica Bogdanovic-Rakovic, Marijan Marcius, Mira Ristic, Ozren Gamulin, Svetozar Music, Kresimir Furic, Alessandro Chiasera, Maurizio Ferrari, Giancarlo Cesare Righini:
Low temperature deposition of SiNx thin films by the LPCVD method. MIPRO 2011: 23-24

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