"Micro and nano structure of electrochemically etched silicon epitaxial wafers."

Ozren Gamulin et al. (2011)

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DOI: —

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type: Conference or Workshop Paper

metadata version: 2021-08-11

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  dblp key:
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Ozren Gamulin, Maja Balarin, Mile Ivanda, Marin Kosovic, Vedran Derek, Lara Mikac, Kristina Serec, Kresimir Furic, Dubravka Krilov:
Micro and nano structure of electrochemically etched silicon epitaxial wafers. MIPRO 2011: 31-32

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