"A Review on Control Strategies of Batch Processing Machines in ..."

Pyung-Hoi Koo, Dug Hee Moon (2013)

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DOI: 10.3182/20130619-3-RU-3018.00203

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-23

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Pyung-Hoi Koo, Dug Hee Moon:
A Review on Control Strategies of Batch Processing Machines in Semiconductor Manufacturing. MIM 2013: 1690-1695

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