"Fabrication of Miniaturized Capacitive Pressure Sensor using Thin Film ..."

S. Uejima et al. (2018)

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DOI: 10.1109/MHS.2018.8887020

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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S. Uejima, Chiemi Oka, Seiichi Hata, Junpei Sakurai:
Fabrication of Miniaturized Capacitive Pressure Sensor using Thin Film Metallic Glass. MHS 2018: 1-5

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