"Mechanical characterization system using on-chip probe with wide range ..."

Keitaro Ito et al. (2016)

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DOI: 10.1109/MHS.2016.7824204

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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  - conf/mhs/ItoSKTKA16
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Keitaro Ito, Shinya Sakuma, Masaki Kimura, Takanori Takebe, Makoto Kaneko, Fumihito Arai:
Mechanical characterization system using on-chip probe with wide range actuation. MHS 2016: 1-2

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