"Turbomolecular high-vacuum pump bearings diagnostics using temperature and ..."

Alessandro Paolo Daga, Luigi Garibaldi, Luca Bonmassar (2021)

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DOI: 10.1109/METROIND4.0IOT51437.2021.9488508

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-02

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Alessandro Paolo Daga, Luigi Garibaldi, Luca Bonmassar:
Turbomolecular high-vacuum pump bearings diagnostics using temperature and vibration measurements. MetroInd4.0&IoT 2021: 264-269

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