"Quality Prediction of PECVD Process with Random Forest and Long Short-Term ..."

Yilei Fu et al. (2023)

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DOI: 10.1109/M2VIP58386.2023.10413390

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-24

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Yilei Fu, Zhisheng Zhang, Zhijie Xia, Haiying Wen, Min Dai, Hui Zhang:
Quality Prediction of PECVD Process with Random Forest and Long Short-Term Memory Neural Network. M2VIP 2023: 1-6

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