"Cavity formation in bonded silicon wafers using partially cured dry etch ..."

Aref Bakhtazad, Rayyan Manwar, Sazzadur Chowdhury (2014)

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DOI: 10.1109/LASCAS.2014.6820298

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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Aref Bakhtazad, Rayyan Manwar, Sazzadur Chowdhury:
Cavity formation in bonded silicon wafers using partially cured dry etch bisbenzocyclobutene (BCB). LASCAS 2014: 1-4

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