"Intelligent Design of Diagnosable Systems: A Case Study of Semiconductor ..."

YuanLin Wen et al. (2007)

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DOI: 10.1007/978-3-540-74827-4_110

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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  - conf/kes/WenCJJ07
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YuanLin Wen, Sheng-Luen Chung, Li-Der Jeng, MuDer Jeng:
Intelligent Design of Diagnosable Systems: A Case Study of Semiconductor Manufacturing Machines. KES (2) 2007: 877-884

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