"Optical Characteristics of Antireflection of SiN Layer on the Si Substrate."

Haifeng Chen, Duan Xie (2015)

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DOI: 10.1007/978-3-319-38789-5_48

access: closed

type: Conference or Workshop Paper

metadata version: 2017-08-25

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Haifeng Chen, Duan Xie:
Optical Characteristics of Antireflection of SiN Layer on the Si Substrate. ITITS (1) 2015: 393-398

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