"Novel Optical Probing System with Submicron Spatial Resolution for ..."

Kazuyuki Ozaki et al. (1996)

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DOI: 10.1109/TEST.1996.556971

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  - https://dblp.org/rec/conf/itc/OzakiSWGUM96
Kazuyuki Ozaki, Hidenori Sekiguchi, Shinichi Wakana, Yoshiro Goto, Yasutoshi Umehara, Jun Matsumoto:
Novel Optical Probing System with Submicron Spatial Resolution for Internal Diagnosis of VLSI Circuits. ITC 1996: 269-275

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