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"Electron Beam Prober for LSI Testing with 100ps Time Resolution."
Y. Goto et al. (1984)
- Y. Goto, K. Ozaki, T. Ishizuka, A. Ito, Y. Furukawa, T. Inagaki:
Electron Beam Prober for LSI Testing with 100ps Time Resolution. ITC 1984: 543-549
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