"A matched expansion MEMS probe card with low CTE LTCC substrate."

Seong-Hun Choe, Shuji Tanaka, Masayoshi Esashi (2007)

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DOI: 10.1109/TEST.2007.4437618

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Seong-Hun Choe, Shuji Tanaka, Masayoshi Esashi:
A matched expansion MEMS probe card with low CTE LTCC substrate. ITC 2007: 1-6

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