"Use of In-Fab Parametric Testing for Process Control of Semiconductor ..."

Robert W. Atherton, David M. Campbell (1983)

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DOI: —

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type: Conference or Workshop Paper

metadata version: 2002-11-05

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Robert W. Atherton, David M. Campbell:
Use of In-Fab Parametric Testing for Process Control of Semiconductor Manufacturing. ITC 1983: 238-247

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