"Guiding Template-Induced Design Challenges in DSA-MP Lithography."

Shao-Yun Fang, Kuo-Hao Wu (2018)

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DOI: 10.1109/ISVLSI.2018.00097

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Shao-Yun Fang, Kuo-Hao Wu:
Guiding Template-Induced Design Challenges in DSA-MP Lithography. ISVLSI 2018: 500-502

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