"A ΔΣ interface for MEMS accelerometers using electrostatic ..."

Pedram Lajevardi, Vladimir P. Petkov, Boris Murmann (2012)

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DOI: 10.1109/ISSCC.2012.6176972

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-02

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Pedram Lajevardi, Vladimir P. Petkov, Boris Murmann:
A ΔΣ interface for MEMS accelerometers using electrostatic spring-constant modulation for cancellation of bondwire capacitance drift. ISSCC 2012: 196-198

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