"Towards ultra-dense arrays of VHF NEMS with FDSOI-CMOS active pixels for ..."

Gregory Arndt et al. (2012)

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DOI: 10.1109/ISSCC.2012.6177005

access: closed

type: Conference or Workshop Paper

metadata version: 2025-03-03

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Gregory Arndt, Cecilia Dupre, Julien Arcamone, Gerald Cibrario, Olivier Rozeau, Laurent Duraffourg, Eric Ollier, Éric Colinet:
Towards ultra-dense arrays of VHF NEMS with FDSOI-CMOS active pixels for sensing applications. ISSCC 2012: 320-322

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