"Design and PID Control of Piezoelectric Micro-motion Stage."

Feng Sun et al. (2018)

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DOI: 10.1109/IISR.2018.8535672

access: closed

type: Conference or Workshop Paper

metadata version: 2024-06-03

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Feng Sun, Shengfei Qi, Junshan Bao, Fangchao Xu, Wenhui Zhao:
Design and PID Control of Piezoelectric Micro-motion Stage. ISR 2018: 110-115

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