"A DFM Methodology to Evaluate the Impact of Lithography Conditions on the ..."

Peter Wright, Minghui Fan (2006)

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DOI: 10.1109/ISQED.2006.9

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Peter Wright, Minghui Fan:
A DFM Methodology to Evaluate the Impact of Lithography Conditions on the Speed of Critical Paths in a VLSI Circuit. ISQED 2006: 813-817

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