"An Efficient Rule-Based OPC Approach Using a DRC Tool for 0.18mum ASIC."

Ji-Soong Park et al. (2000)

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DOI: 10.1109/ISQED.2000.838858

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Ji-Soong Park, Chul-Hong Park, Sang-Uhk Rhie, Yoo-Hyon Kim, Moon-Hyun Yoo, Jeong-Taek Kong, Hyung-Woo Kim, Sun-Il Yoo:
An Efficient Rule-Based OPC Approach Using a DRC Tool for 0.18mum ASIC. ISQED 2000: 81-86

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