"A Hybrid PPC Method Based on the Empirical Etch Model for the 0.14µm ..."

Chul-Hong Park et al. (2002)

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DOI: 10.1109/ISQED.2002.996717

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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Chul-Hong Park, Soo-Han Choi, Sang-Uhk Rhie, Dong-Hyun Kim, Jun-Seong Park, Tae-Hwang Jang, Ji-Soong Park, Yoo-Hyon Kim, Moon-Hyun Yoo, Jeong-Taek Kong:
A Hybrid PPC Method Based on the Empirical Etch Model for the 0.14µm DRAM Generation and Beyond. ISQED 2002: 143-147

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