"Vertically-addressed test structures (VATS) for 3D IC variability and ..."

Conor O'Sullivan, Peter M. Levine, Siddharth Garg (2013)

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DOI: 10.1109/ISQED.2013.6523596

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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Conor O'Sullivan, Peter M. Levine, Siddharth Garg:
Vertically-addressed test structures (VATS) for 3D IC variability and stress measurements. ISQED 2013: 96-103

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