"Capacitance and Yield Evaluations Using a 90-nm Process Technology Based ..."

Atsushi Kurokawa et al. (2005)

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DOI: 10.1109/ISQED.2005.29

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Atsushi Kurokawa, Masaharu Yamamoto, Nobuto Ono, Tetsuro Kage, Yasuaki Inoue, Hiroo Masuda:
Capacitance and Yield Evaluations Using a 90-nm Process Technology Based on the Dense Power-Ground Interconnect Architecture. ISQED 2005: 153-158

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