"Bilinear Lithography Hotspot Detection."

Hang Zhang et al. (2017)

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DOI: 10.1145/3036669.3036673

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-07

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Hang Zhang, Fengyuan Zhu, Haocheng Li, Evangeline F. Y. Young, Bei Yu:
Bilinear Lithography Hotspot Detection. ISPD 2017: 7-14

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