"Physical Layout Design of Directed Self-Assembly Guiding Alphabet for IC ..."

H.-S. Philip Wong et al. (2015)

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DOI: 10.1145/2717764.2723574

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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H.-S. Philip Wong, He Yi, Maryann C. Tung, Kye Okabe:
Physical Layout Design of Directed Self-Assembly Guiding Alphabet for IC Contact Hole/via Patterning. ISPD 2015: 65-66

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