"Density gradient minimization with coupling-constrained dummy fill for CMP ..."

Huang-Yu Chen, Szu-Jui Chou, Yao-Wen Chang (2010)

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DOI: 10.1145/1735023.1735052

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Huang-Yu Chen, Szu-Jui Chou, Yao-Wen Chang:
Density gradient minimization with coupling-constrained dummy fill for CMP control. ISPD 2010: 105-111

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