"The Control of Membrane Thickness in PECVD Process Utilizing a Rule ..."

Ming Chang, Jen-Cheng Chen, Jia-Sheng Heh (2006)

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DOI: 10.1007/11760191_159

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-19

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Ming Chang, Jen-Cheng Chen, Jia-Sheng Heh:
The Control of Membrane Thickness in PECVD Process Utilizing a Rule Extraction Technique of Neural Networks. ISNN (2) 2006: 1091-1098

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