"Predictive discarding of wafers based on power leakage predictions from ..."

Geert H. van Kollenburg et al. (2021)

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DOI: 10.1016/J.PROCS.2022.01.352

access: open

type: Conference or Workshop Paper

metadata version: 2023-03-21

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  - conf/ism2/KollenburgHVM21
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Geert H. van Kollenburg, Mike Holenderski, Patrizia Vasquez, Nirvana Meratnia:
Predictive discarding of wafers based on power leakage predictions from single layer misalignment data. ISM 2021: 1508-1515

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