"On the energy-optimal precise wafer stage positioning: Equivalence with ..."

Ilya Ioslovich, Shai Moshenberg, Per-Olof Gutman (2015)

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DOI: 10.1109/ISIE.2015.7281450

access: closed

type: Conference or Workshop Paper

metadata version: 2021-02-01

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Ilya Ioslovich, Shai Moshenberg, Per-Olof Gutman:
On the energy-optimal precise wafer stage positioning: Equivalence with minimal time optimality. ISIE 2015: 95-99

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