"Modeling and Scheduling for the Clean Operation of Semiconductor ..."

Ya-Chih Tsai, Jihong Pang, Fuh-Der Chou (2019)

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DOI: 10.1007/978-981-15-5577-0_38

access: closed

type: Conference or Workshop Paper

metadata version: 2023-04-29

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Ya-Chih Tsai, Jihong Pang, Fuh-Der Chou:
Modeling and Scheduling for the Clean Operation of Semiconductor Manufacturing. ISICA 2019: 488-496

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