"Heterogeneous integration of GaN device layer by epitaxial film bonding."

Mitsuhiko Ogihara, Shin Yokoyama, Yoshiteru Amemiya (2019)

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DOI: 10.1109/ISDCS.2019.8719268

access: closed

type: Conference or Workshop Paper

metadata version: 2019-05-30

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Mitsuhiko Ogihara, Shin Yokoyama, Yoshiteru Amemiya:
Heterogeneous integration of GaN device layer by epitaxial film bonding. ISDCS 2019: 1-3

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