"A defect level monitor of resistive open defect at interconnects in 3D ICs ..."

Kouhei Ohtani et al. (2017)

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DOI: 10.1109/ISCIT.2017.8261176

access: closed

type: Conference or Workshop Paper

metadata version: 2018-01-31

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Kouhei Ohtani, Naho Osato, Masaki Hashizume, Hiroyuki Yotsuyanagi, Shyue-Kung Lu:
A defect level monitor of resistive open defect at interconnects in 3D ICs by injected charge volume. ISCIT 2017: 1-5

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