"Model of Capacitive Micromechanical Accelerometer Including Effect of ..."

Timo Veijola, Tapani Ryhänen (1995)

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DOI: 10.1109/ISCAS.1995.521601

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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Timo Veijola, Tapani Ryhänen:
Model of Capacitive Micromechanical Accelerometer Including Effect of Squeezed Gas Film. ISCAS 1995: 664-667

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