"Micromachined piezoresistive tactile sensor array fabricated by ..."

Tanom Lomas, Adisorn Tuantranont, F. Cheevasuvit (2003)

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DOI: 10.1109/ISCAS.2003.1206355

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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Tanom Lomas, Adisorn Tuantranont, F. Cheevasuvit:
Micromachined piezoresistive tactile sensor array fabricated by bulk-etched MUMPs process. ISCAS (4) 2003: 856-859

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