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"Micromachined microphone with optical interferometric readout."

F. L. Degertekin, Neal A. Hall (2001)

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DOI: 10.1109/ISCAS.2001.921275

access: closed

type: Conference or Workshop Paper

metadata version: 2021-07-29

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  - conf/iscas/DegertekinH01
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F. L. Degertekin, Neal A. Hall:
Micromachined microphone with optical interferometric readout. ISCAS (3) 2001: 177-180

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