"Bistability in a CMOS-MEMS Thermally Tuned Microbeam Resonator."

Joan Barceló et al. (2018)

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DOI: 10.1109/ISCAS.2018.8351225

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Joan Barceló, Ivan de Paúl, Sebastià A. Bota, Jaume Segura, Jaume Verd:
Bistability in a CMOS-MEMS Thermally Tuned Microbeam Resonator. ISCAS 2018: 1-5

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