"Impact of Gate Stack Thermal Budget on NBTI Reliability in Gate-All-Around ..."

Huimei Zhou et al. (2023)

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DOI: 10.1109/IRPS48203.2023.10117828

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-28

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Huimei Zhou, Miaomiao Wang, Nicolas Loubet, Andrew Gaul, Yasir Sulehria:
Impact of Gate Stack Thermal Budget on NBTI Reliability in Gate-All-Around Nanosheet P-type Devices. IRPS 2023: 1-6

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