"High Resolution Observation of Subsurface Defects at SiO2/4H-SiC ..."

Yuji Yamagishi, Yasuo Cho (2019)

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DOI: 10.1109/IRPS.2019.8720482

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-25

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Yuji Yamagishi, Yasuo Cho:
High Resolution Observation of Subsurface Defects at SiO2/4H-SiC Interfaces by Local Deep Level Transient Spectroscopy Based on Time-Resolved Scanning Nonlinear Dielectric Microscopy. IRPS 2019: 1-4

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