"High-temperature and high-field cycling reliability of PZT films embedded ..."

Grant Walters et al. (2018)

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DOI: 10.1109/IRPS.2018.8353676

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Grant Walters, Paul Chojecki, Alexandra Garraud, Toshikazu Nishida, Scott R. Summerfelt, J. A. Rodriguez, A. G. Acosta:
High-temperature and high-field cycling reliability of PZT films embedded within 130 nm CMOS. IRPS 2018: 3-1

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