"Thermal-Neutron SER Mitigation by Cobalt-Contact in 7 nm Bulk-FinFET ..."

Taiki Uemura et al. (2022)

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DOI: 10.1109/IRPS48227.2022.9764581

access: closed

type: Conference or Workshop Paper

metadata version: 2022-05-09

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Taiki Uemura, Byungjin Chung, Jegon Kim, Hyewon Shim, Shin-Young Chung, Brandon Lee, Jaehee Choi, Shota Ohnishi, Ken Machida:
Thermal-Neutron SER Mitigation by Cobalt-Contact in 7 nm Bulk-FinFET Technology. IRPS 2022: 7

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