"Reliability of Mo as Word Line Metal in 3D NAND."

Davide Tierno et al. (2021)

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DOI: 10.1109/IRPS46558.2021.9405132

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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  dblp key:
  - conf/irps/TiernoCARBR21
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Davide Tierno, Kristof Croes, Arjun Ajaykumar, Siva Ramesh, Geert Van den Bosch, Maarten Rosmeulen:
Reliability of Mo as Word Line Metal in 3D NAND. IRPS 2021: 1-6

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