"Improved Endurance Reliability of Ferroelectric Hafnium Oxide-Based BEoL ..."

Ayse Sünbül et al. (2024)

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DOI: 10.1109/IRPS48228.2024.10529302

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-04

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Ayse Sünbül, David Lehninger, Raik Hoffmann, Hannes Mähne, Kerstin Bernert, Steffen Thiem, Thomas Kämpfe, Konrad Siedel, Maximilian Lederer, Lukas M. Eng:
Improved Endurance Reliability of Ferroelectric Hafnium Oxide-Based BEoL Integrated MFM Capacitors. IRPS 2024: 1-5

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