"BEOL Process Development Using Fast Power Cycling on Test Structures."

Matt Ring et al. (2019)

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DOI: 10.1109/IRPS.2019.8720455

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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Matt Ring, Johan De Greve, Bill Cowell, Darren Moore, Jeff Gambino:
BEOL Process Development Using Fast Power Cycling on Test Structures. IRPS 2019: 1-6

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