"Light-Assisted Investigation of the Role of Oxygen Flow during IGZO ..."

Pietro Rinaudo et al. (2024)

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DOI: 10.1109/IRPS48228.2024.10529432

access: closed

type: Conference or Workshop Paper

metadata version: 2024-05-29

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Pietro Rinaudo, Adrian Vaisman Chasin, Ying Zhao, Ben Kaczer, Nouredine Rassoul, Harold Dekkers, Michiel J. van Setten, Attilio Belmonte, Ingrid De Wolf, Gouri Sankar Kar, Jacopo Franco:
Light-Assisted Investigation of the Role of Oxygen Flow during IGZO Deposition on Deep Subgap States and their Evolution Under PBTI. IRPS 2024: 1-6

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