"Machine Learning Based V-ramp VBD Predictive Model Using OCD-measured Fab ..."

SungMan Rhee et al. (2023)

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DOI: 10.1109/IRPS48203.2023.10117962

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-24

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SungMan Rhee, Hyunjin Kim, Sangku Park, Taiki Uemura, Yuchul Hwang, Seungjin Choo, Jinju Kim, Hwasung Rhee, Shin-Young Chung:
Machine Learning Based V-ramp VBD Predictive Model Using OCD-measured Fab Parameters for Early Detection of MOL Reliability Risk. IRPS 2023: 1-4

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