"Systematic Study of Process Impact on FinFET Reliability."

Rakesh Ranjan et al. (2021)

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DOI: 10.1109/IRPS46558.2021.9405134

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-01

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Rakesh Ranjan, Ki-Don Lee, Md Iqbal Mahmud, Mohammad Shahriar Rahman, Pavitra Ramadevi Perepa, Charles Briscoe LaRow, Caleb Dongkyun Kwon, Maihan Nguyen, Minhyo Kang, Ashish Kumar Jha, Ahmed Shariq, Shamas Musthafa Ummer, Susannah Laure Prater, Hyunchul Sagong, HwaSung Rhee:
Systematic Study of Process Impact on FinFET Reliability. IRPS 2021: 1-5

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