"GHz C-V Characterization Methodology and Its Application for Understanding ..."

Yiming Qu et al. (2022)

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DOI: 10.1109/IRPS48227.2022.9764436

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Yiming Qu, Yang Shen, Mingji Su, Jiwu Lu, Yi Zhao:
GHz C-V Characterization Methodology and Its Application for Understanding Polarization Behaviors in High-k Dielectric Films. IRPS 2022: 3

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